JPH088405Y2 - 圧電素子微小位置決め機構 - Google Patents

圧電素子微小位置決め機構

Info

Publication number
JPH088405Y2
JPH088405Y2 JP1987152539U JP15253987U JPH088405Y2 JP H088405 Y2 JPH088405 Y2 JP H088405Y2 JP 1987152539 U JP1987152539 U JP 1987152539U JP 15253987 U JP15253987 U JP 15253987U JP H088405 Y2 JPH088405 Y2 JP H088405Y2
Authority
JP
Japan
Prior art keywords
piezoelectric element
element body
detection probe
electrode
hollow cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987152539U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0180755U (en]
Inventor
寛 阪東
洋志 徳本
文樹 坂井
千加良 宮田
茂 脇山
Original Assignee
工業技術院長
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長, セイコー電子工業株式会社 filed Critical 工業技術院長
Priority to JP1987152539U priority Critical patent/JPH088405Y2/ja
Publication of JPH0180755U publication Critical patent/JPH0180755U/ja
Application granted granted Critical
Publication of JPH088405Y2 publication Critical patent/JPH088405Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1987152539U 1987-10-05 1987-10-05 圧電素子微小位置決め機構 Expired - Lifetime JPH088405Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987152539U JPH088405Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987152539U JPH088405Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Publications (2)

Publication Number Publication Date
JPH0180755U JPH0180755U (en]) 1989-05-30
JPH088405Y2 true JPH088405Y2 (ja) 1996-03-06

Family

ID=31427559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987152539U Expired - Lifetime JPH088405Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Country Status (1)

Country Link
JP (1) JPH088405Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0792462B2 (ja) * 1988-05-16 1995-10-09 三菱電機株式会社 走査型トンネル顕微鏡の微動機構

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62117379A (ja) * 1985-11-16 1987-05-28 Tohoku Metal Ind Ltd 円筒型圧電アクチユエ−タ及びその製造方法

Also Published As

Publication number Publication date
JPH0180755U (en]) 1989-05-30

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